Equipment

Fabrication of materials and structures

Q150R Sputter Coater Quorum

Fabrication of materials and structures

Xe lamp 1000W Oriel

Fabrication of materials and structures

Xe lamp 300W Oriel

Fabrication of materials and structures

Gatan PIPS system Model 691

Fabrication of materials and structures

Allied MultiPrep System 8″ Mechanical Polisher

Fabrication of materials and structures

Sample preparation for transmission electron microscopy (TEM)

Characterization of materials and devices

FEI Tecnai G2 F20 S-TWIN Transmission Electron Microscope (200 kV)

Characterization of materials and devices

Veeco Atomic Force Microscope (AFM)

Characterization of materials and devices

Atomic force microscope (AFM) by NTMDT

Characterization of materials and devices

High-resolution X-ray diffractometer Empyrean Panalytical

Characterization of materials and devices

Measuring system for detecting deep trap states using DLTS (Deep Level Transient Spectroscopy), L-DLTS (Laplace DLTS), DLOS (Deep Level Optical Spectroscopy), and TAS (Thermal Admittance Spectroscopy) techniques

Characterization of materials and devices

Secondary Ion Mass Spectrometer CAMECA IMS 7f-Auto